JPH0526618B2 - - Google Patents

Info

Publication number
JPH0526618B2
JPH0526618B2 JP60237220A JP23722085A JPH0526618B2 JP H0526618 B2 JPH0526618 B2 JP H0526618B2 JP 60237220 A JP60237220 A JP 60237220A JP 23722085 A JP23722085 A JP 23722085A JP H0526618 B2 JPH0526618 B2 JP H0526618B2
Authority
JP
Japan
Prior art keywords
stage
horizontal plane
base
axis
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60237220A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6299038A (ja
Inventor
Minoru Ikeda
Motoya Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60237220A priority Critical patent/JPS6299038A/ja
Publication of JPS6299038A publication Critical patent/JPS6299038A/ja
Publication of JPH0526618B2 publication Critical patent/JPH0526618B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • B23Q1/4809Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair followed perpendicularly by a single rotating pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Control Of Position Or Direction (AREA)
JP60237220A 1985-10-25 1985-10-25 位置決めステ−ジ Granted JPS6299038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60237220A JPS6299038A (ja) 1985-10-25 1985-10-25 位置決めステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237220A JPS6299038A (ja) 1985-10-25 1985-10-25 位置決めステ−ジ

Publications (2)

Publication Number Publication Date
JPS6299038A JPS6299038A (ja) 1987-05-08
JPH0526618B2 true JPH0526618B2 (en]) 1993-04-16

Family

ID=17012159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237220A Granted JPS6299038A (ja) 1985-10-25 1985-10-25 位置決めステ−ジ

Country Status (1)

Country Link
JP (1) JPS6299038A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729632Y2 (ja) * 1988-08-05 1995-07-05 株式会社カイジョー ボンディング装置におけるxyテーブル
JPH0335950A (ja) * 1989-06-30 1991-02-15 Myotoku Kk 移動テーブル装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59129636A (ja) * 1983-01-10 1984-07-26 Hitachi Ltd 6自由度を有するステ−ジの制御装置

Also Published As

Publication number Publication date
JPS6299038A (ja) 1987-05-08

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